发明名称 Method of preventing transfer of adhesive substance to dicing ring frame, pressure-sensitive adhesive sheet for use in the method and wafer working sheet having the pressure-sensitive adhesive sheet
摘要 The present invention disposes an easily releasing layer on a surface intended for dicing tape sticking of a dicing ring frame to thereby enable preventing the transfer of an adhesive substance to the ring frame for use in semiconductor wafer working, reducing the frequency of cleaning of the ring frame to the requisite minimum and prolonging the life of the ring frame.
申请公布号 US5888606(A) 申请公布日期 1999.03.30
申请号 US19970873356 申请日期 1997.06.12
申请人 LINTEC CORPORATION 发明人 SENOO, HIDEO;SUGINO, TAKASI
分类号 B28D7/04;B28D5/00;H01L21/301;H01L21/68;(IPC1-7):B32B3/10;B32B7/06;B32B7/12 主分类号 B28D7/04
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