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经营范围
发明名称
ANTIREFLECTION FILM MATERIAL COATING DEVICE
摘要
申请公布号
JPH1187217(A)
申请公布日期
1999.03.30
申请号
JP19970241298
申请日期
1997.09.05
申请人
SONY CORP
发明人
ONUMA EIJU;IKEDA RIKIO
分类号
G03F7/11;B05C11/08;G03F7/16;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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