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发明名称
ROTARY SUBSTRATE WASHING APPARATUS
摘要
申请公布号
KR0171491(B1)
申请公布日期
1999.03.30
申请号
KR19950030253
申请日期
1995.09.15
申请人
DAINIPPON SCREEN MFG CO.,LTD
发明人
NISHIMURA, JOICHI;SASAKI, TADASHI;OTANI, MASAMI
分类号
A46B13/04;H01L21/304;(IPC1-7):H01L21/304
主分类号
A46B13/04
代理机构
代理人
主权项
地址
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