| 摘要 |
PROBLEM TO BE SOLVED: To provide a very fine wire having a possibly superior strength/draw ration, by making the wire of an Au alloy contg. specified wt.% of Pt, Ce misch metal and alkaline earth elements, and specifying the Ce wt.% of the Ce misch metal. SOLUTION: A method of manufacturing a very fine wire for contacting of semiconductor manufacturing members comprises the steps of melting an Au alloy contg. Pt 0.05-0.95 wt.%, Ce misch metal 0.001-0.1 wt.%, alkaline earth metal 0-0.1 wt.% and Au, the rest where Ce content of this metal is at least the 50 wt.%, continuously casting the molten alloy, drawing cast strands into wires having diameters usually used for bonding use, and heating the wires at high temperature. This is effective esp. when casting the molten alloy to form strands having circular cross sections and heating the wires at about 300-700 deg.C. Thus, it is possible to find very fine wire having a possibly superior strength/draw ratio. |
