| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film multilayer electrode whose electric characteristic can be adjusted after manufacture by using magnetic materials for at least thin film conductors or thin film insulating films, which are alternately stacked on a dielectric substrate. SOLUTION: An adhesive conductor layer is formed between the dielectric substrate 10 and the thin film conductor 21. Adhesive conductor layers 41-48 are respectively formed between the thin film conductor 21 and the thin film insulating body 31a, between the thin film insulating body 31a and the thin film conductor 22, between the thin film conductor 22 and the thin film insulating body 32a, between the thin film insulating body 32a and the thin film conductor 23, between the thin film conductor 23 and the thin film insulating body 33a, between the thin film insulating body 33a and the thin film conductor 24, between the thin film conductor 24 and the thin film insulating body 34a and the thin film insulating body 34a and the thin film conductor 25. They are constituted by using the thin film insulating bodies 31a-34a formed of magnetic materials. The respective film thicknesses of the thin film conductor layers and the thin film insulating bodies are set by considering the material characteristics of the respective layers containing relative permeability so that the conduction loss of the multilayer electrode becomes minimum. |
