发明名称 DRIVING DEVICE FOR VIBRATION ACTUATOR
摘要 PROBLEM TO BE SOLVED: To finely or intermittently drive a vibration actuator with an inexpensive constitution by controlling the relative motions of a vibrator by alternatively impressing a plurality of frequency signals having different phases and a plurality of frequency signals having the same frequency upon an electromechanical conversion element for driving. SOLUTION: A phase shifter 3 outputs a signal S1 which is shaped in a rectangular wave by controlling an oscillation frequency by using an input voltage by means of a VCO 2 as two signals S2 and S3 having phases which are shifted from each other by π/2. An exclusive OR gate 4 decides the driving direction of a vibration actuator 1 by deciding the phase to be shifted. Amplifiers 5 and 6 amplify the output signal of a switching circuit 9 to the driving level of the actuator 1 and impress the amplified signals upon the piezoelectric element of the actuator 1 as A- and B-phase signals. The signal used as the B-phase signal is switched between the signals S2 and S3 by means of switching circuits 8 and 9. Since the actuator 1 is intermittently driven by switching the phases of the A- and B-phase signals impressed upon the actuator 1 to the same phases and opposite phases at prescribed intervals, the actuator 1 can be driven finely.
申请公布号 JPH1189255(A) 申请公布日期 1999.03.30
申请号 JP19970235975 申请日期 1997.09.01
申请人 NIKON CORP 发明人 GONDA TSUNEMI
分类号 H02N2/00 主分类号 H02N2/00
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