| 摘要 |
PROBLEM TO BE SOLVED: To stably secure an extremely low degree of floating by a method wherein an aging processing is performed to release the internal stress of a bar before and/or simultaneously with lapping treatment and then, a rail and a negative pressure generation part are formed on each slider to form an ABS surface higher in flatness and accuracy. SOLUTION: A wafer where magnetic transducers 30, leads 31 and input/ output terminals 32 large in number are formed in a matrix is cut to take out a bar 33 in which a plurality of sliders are arranged in a row. The bar 33 is bonded by an adhesive on a working jig with an ABS surface upward and undergoes an aging treatment on a hot plate to release the bar from an internal distortion therein 33 and that of the adhesive. Under such a condition, after a lapping treatment, the bar 33 is peeled off the jig to implement a rail etching process containing etching treatment using a photolithography. The bar 33 is cut by machining to be divided into slider pieces individually. |
