发明名称 |
Apparatus for adjusting initial position of melt surface |
摘要 |
An apparatus and a method capable of automatically adjusting an initial position of the surface of a melt without an operator are provided. In a single crystal puller using a wire as a suspender for a seed crystal for growing a single crystal of silicon or the like according to the CZ method, a reference position of the seed crystal is detected, the wire is unwound to lower the end of the wire to a position higher by a distance W-X from the reference position and then pulled upward above said reference position to correct the wire for an extension due to the weight of a single crystal attached thereto. Also, the wire is left above a melt for about ten minutes to provide a constant amount of extension to the wire due to heat of the melt These operations are automatically performed.
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申请公布号 |
US5888299(A) |
申请公布日期 |
1999.03.30 |
申请号 |
US19960760963 |
申请日期 |
1996.12.05 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
URANO, MASAHIKO;OZAKI, ATSUSHI;KAKEGAWA, TOMOHIRO;NAKANO, HIDEKI |
分类号 |
C30B15/20;C30B15/26;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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