Method for shallow trench isolation,申请号SG19980000033-传众专利搜索

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发明名称	Method for shallow trench isolation
摘要
申请公布号	SG63797(A1)	申请公布日期	1999.03.30
申请号	SG19980000033	申请日期	1998.01.06
申请人	CHARTERED SEMICONDUCTOR MANUFACTURING LTD	发明人	ZHENG JIA ZHEN;TAY WEE SONG CHARLIE
分类号	H01L21/762;(IPC1-7):H01L21/76	主分类号	H01L21/762
代理机构		代理人
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地址

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