| 摘要 |
PROBLEM TO BE SOLVED: To calibrate a wavelength meter, by roughly determining the wavelength of an ArF laser, by tuning the laser to an arbitrary absorption line of gas, and by fine-tuning the laser to an absorption line near a final wavelength. SOLUTION: First, the wavelength of an ArF laser 103 is roughly determined, the laser 103 emits a laser beam A, and the laser beam A enters a wavelength detection system 105. The system 105 directs A1 that is one part of the laser beam A to a photoelectric detector 120 by using a splitter 118 and a mirror 119. An intensity level outputted from the photoelectric detector 120 is detected by a processor 134, an operation for controlling a wavelength adjuster 136 is executed, and the laser beam A is tuned to an arbitrary absorption line of gas. Furthermore, switches 120 and 130 are switched, the photoelectric detector 130 is connected to the processor 134, and the laser beam A is fine-tuned to the absorption line near a final wavelength. |
