ION SUPPLYING APPARATUS OF ION INJECTOR,申请号KR19950042512-传众专利搜索

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发明名称	ION SUPPLYING APPARATUS OF ION INJECTOR
摘要
申请公布号	KR0172030(B1)	申请公布日期	1999.03.30
申请号	KR19950042512	申请日期	1995.11.21
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HWANG, YEUN-SANG;HUH, JANG-MOO;CHOE, CHAN-SEUNG;KIM, SUNG-JOO
分类号	H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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