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发明名称
MICRO-PATTERN FORMING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0171944(B1)
申请公布日期
1999.03.30
申请号
KR19950066081
申请日期
1995.12.29
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
MIN, YOUNG-HOON;KIM, HEUNG-ILL
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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