DRY ETCHING APPARATUS,申请号KR19940036613-传众专利搜索

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发明名称	DRY ETCHING APPARATUS
摘要
申请公布号	KR0171062(B1)	申请公布日期	1999.03.30
申请号	KR19940036613	申请日期	1994.12.24
申请人	MATSUSHITA ELECTRIC IND. CO.,LTD	发明人	MATSUDA, IZURU;SUZUKI, MASAKI
分类号	H05K3/06;H01J37/32;H01L21/302;H01L21/3065;H01L21/683;(IPC1-7):H01L21/304	主分类号	H05K3/06
代理机构		代理人
主权项
地址

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