| 摘要 |
PROBLEM TO BE SOLVED: To provide a stator of an ultrasonic motor excellent in insulation and durability wherein electric short-circuit is not generated. SOLUTION: The outer diameter Do2 of a piezoelectric element 10 is smaller than the outer diameter Do1 of a metal elastic body 8c and the outer diameter Do3 of a flexible substrate 11. The inner diameter Di2 of the piezoelectric element 10 is greater than the inner diameter Di1 of the metal elastic body 8c and the inner diameter Di3 of the flexible substrate 11. Adhesive agent 15 is spread on the upper surface of the piezoelectric element 10 and the lower surface of the metal elastic body 8c. Adhesive agent 16 of the same material as the adhesive agent 15 is spread on the lower surface of the piezoelectric element 10 and the upper surface of the flexible substrate 11, and compression bonding is performed. After the adhesive agents are cured, adhesive agents 17, 18 are spread on the peripheral part from the flexible substrate 11 to the elastic body 8c. |
