发明名称 SEMICONDUCTOR SUBSTRATE TRANSPORTATION STORAGE TOOL AND METHOD OF SEMICONDUCTOR SUBSTRATE RECOGNITION
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor substrate transportation storage jig for preventing a semiconductor substrate from being damaged and at the same time for effectively recognizing the semiconductor substrate, and a method for recognizing the semiconductor substrate. SOLUTION: A box-shaped semiconductor substrate transportation storage jig 2 accommodates a semiconductor substrate 1, the semiconductor substrate 1 has a recognition sheet 4, and the storage jig 2 has a positioning part 5 in the inside. Since the travel of the semiconductor substrate 1 is regulated by the positioning part 5, positional deviation is prevented, and an upper part 2a of the semiconductor substrate transportation storage jig 2 is constituted of a transparent material, the recognition sheet 4 is recognized directly from the upper part 2a of the tool, without taking out the semiconductor substrate 1.</p>
申请公布号 JPH1187482(A) 申请公布日期 1999.03.30
申请号 JP19970237993 申请日期 1997.09.03
申请人 MATSUSHITA ELECTRON CORP 发明人 KIMOTO NOBUYO;UCHIDA ITSURO;MATSUSHITA YOSHISHIGE
分类号 H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/673
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