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经营范围
发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH1186770(A)
申请公布日期
1999.03.30
申请号
JP19970248142
申请日期
1997.09.12
申请人
HITACHI LTD
发明人
OSE YOICHI;YOSHINARI KIYOMI
分类号
H01J37/244;H01J37/28;(IPC1-7):H01J37/244
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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