| 摘要 |
An extremely small aperture is formed using a sharp conductive tip. The aperture may be in the form of a transparent window or an open aperture. In a first embodiment, the conductive tip is positioned adjacent a layer of titanium and a voltage is applied to the tip. The intense electric field near the tip anodizes the titanium and creates a small transparent window of titanium dioxide. In a second embodiment, a titanium layer is covered with a layer of silicon, a small region of the silicon is oxidized using a conductive tip, and the silicon and then the titanium are etched. In a third embodiment, an electric field from a conductive tip creates a pit in a surface titanium oxide layer. The titanium is then etched, using the oxide layer as a mask, to form an open aperture. The conductive tip is preferably the tip of an atomic force microscope. This process is useful in constructing any instrument, such as a near field optical scanning microscope or a scanning ion conductance microscope, which requires an extremely small, precise aperture.
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