SCHULTZ-SLIT AND POLAR FIGURE-MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent an X-ray irradiation region from exceeding the width of a sample even when the sample is rotated onα-axis to makeαrotation while the X-rays are applied with a low angle by setting the longitudinal limitation width of a low-angle incidence side so that it is smaller than that of a high-angle incidence side. SOLUTION: A longitudinal limitation width H1 of the left end of a narrow opening 42 being formed in a Schultz slit 40 is smaller than a longitudinal limitation width H2 of a right end, and the longitudinal limitation width is linearly increased toward the right end from the left one. In this case, H1 and H2 are set to approximately 0.5 mm and 1.5 mm, respectively. When an X-rays source 10 is positioned so that an X-rays incidence angle to a sample 18 becomesθa, incidence X-rays 12a at that time pass through a longitudinal limitation width Ha of the opening 42 of the Schultz slit 40. When the X-rays incident angle isθb, incidence X-rays 12b pass through a longitudinal limitation width Hb. Ifθa<θb Ha