| 摘要 |
PROBLEM TO BE SOLVED: To facilitate fixing of an optical fiber and to ensure the fail-proof coupling of an optical element and the optical fiber by fitting specific plural ridges to each other, thereby positioning the optical element and the optical fiber. SOLUTION: The first ridge 2 and second ridge 2 which are the ridges for alignment arrayed in an X direction and the third ridge 4 which is the ridge for mounting an LD (semiconductor laser) are formed by anisotropic etching of the (111) face of Si on a packaging substrate 1 for the LD cut out at the (100) face. On the other hand, the fourth ridge 12 and fifth ridge 13 which are the ridges for alignment and the sixth ridge 14 which is the ridge for mounting the optical fiber and a V-groove 15 for the optical fiber are formed by anisotropic etching of the (111) face of the Si on a packaging substrate 11 for the optical fiber cut out at the (100) face. The substrates 1 and 11 are coupled by fitting the ridges 2, 3 to 12, 13 and 14. As a result, an electrode 5 is formed on the ridge 4 and the alignment of the active layer of the LD 6 bonded thereon and the core of the optical fiber 16 inserted into the groove 15 is made possible. |
