CORROSION RESISTANT MEMBER, WAFER MOUNTING MEMBER, AND MANUFACTURE OF CORROSION RESISTANT MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a corrosion resistant member capable of preventing the occurrence of corrosion and the formation of particles even in the case where it is exposed to a plasma of halogen-type corrosive gas particularly in the temp. region as high as >=500$0C. SOLUTION: This member is a corrosion resistant member having corrosion resistance to a plasma of halogen type corrosive gas and has a main body and a corrosion resistant layer formed on the surface of the main body, and the corrosion resistant layer contains fluorides of one or more elements selected from the group consisting of rare earth elements and alkaline earth elements. Moreover, it is preferable that the corrosion resistant layer is a film composed of fluorides and the main body is composed of aluminum nitride ceramics.