| 摘要 |
PROBLEM TO BE SOLVED: To enhance the sensing sensitivity by decreasing noise component super posed on a measuring signal for the electrostatic capacitance between electrodes. SOLUTION: In such a way as confronting a stationary electrode 1a, X-system electrodes (X positive electrode 2b and X negative electrode 2c) are provided in the positive and negative directions of the X-axis and also Y-system electrodes (Y positive electrode 2d and Y negative electrode 2e) are provided in the positive and negative directions of the Y-axis to the center of the inner surface of a flexible board 2. The X-system electrodes are used as driving electrodes while the Y-system electrodes are used as sensing electrodes for the angular velocity in the Y-axis direction, or otherwise, the X-system electrodes may be used as sensing electrodes for the angular velocity in the X-axis direction while the Y-system electrodes be used as driving electrodes. A first phase rectangular wave voltage is impressed on one of the driving electrodes while the second phase rectangular wave voltage impressed on the other (for both, the duty ratio 0.1 to 0.4) so that the flexible board 2 is vibrated in rotational displacements, and thereby the distortion of the sine wave vibration in the Z-axis direction on the driving electrodes and sensing electrodes is lessened. |
