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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH1180945(A)
申请公布日期
1999.03.26
申请号
JP19970242253
申请日期
1997.09.08
申请人
RAIKU:KK
发明人
NANBU NOBUMASA
分类号
C23C14/34;C23C14/50;H01L21/203;H01L21/285;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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