| 发明名称 |
Miniaturized photo-acoustic spectrometer |
| 摘要 |
An infrared source (18) modulated at about 20 Hz and mirror (24) are formed and sealed (22) between semiconducting substrata (2,4) and a further substrata (6) constitutes a filter. A micro-oven (12) is formed in another substratum (8) which is also used with a final substratum (10) to form a microphone (14) having electrodes (38,39).
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| 申请公布号 |
FR2768813(A1) |
申请公布日期 |
1999.03.26 |
| 申请号 |
FR19970011697 |
申请日期 |
1997.09.19 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
JOURDAIN ANNE;BIETH CLAUDE;CONSTANTIN OLIVIER |
| 分类号 |
G01N29/00;G01N21/00;G01N21/17;G02B26/00;(IPC1-7):G01J3/26;H01L49/00 |
主分类号 |
G01N29/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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