发明名称 Mounting platform for crystal or other transparent substrate
摘要 The mounting platform (2) is made if transparent material and has grooves, holes, etc. to prevent the substrate sliding or adhering to the platform. LEDs (6) below the platform project light directly onto the substrate. Light reflected from scratches can be picked up directly above the substrate by the camera (13) and lens system. The platform may be made of sapphire. Independent claims are also given for a scratch inspection device, a method and device for inspecting bevels of a transparent substrate and a method for inspecting the transparent substrate.
申请公布号 DE19838410(A1) 申请公布日期 1999.03.25
申请号 DE1998138410 申请日期 1998.08.24
申请人 NIPPON MAXIS CO.,LTD., TOKYO, SHINJUKU-KU, JP 发明人 KOBAYASHI, RYO, TOKIO/TOKYO, JP
分类号 G01N21/88;(IPC1-7):G01N21/88;G01N21/47 主分类号 G01N21/88
代理机构 代理人
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