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发明名称
Substratabstützvorrichtung für ein Substratgehäuse
摘要
申请公布号
DE19781572(T1)
申请公布日期
1999.03.25
申请号
DE19971081572T
申请日期
1997.02.06
申请人
PROGRESSIVE SYSTEM TECHNOLOGIES, INC., AUSTIN, TEX., US
发明人
BABBS, DANIEL A., AUSTIN, TEX., US
分类号
H01L21/673;(IPC1-7):A47F7/00
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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