发明名称 TEMPERATURE PROBE
摘要 A temperature probe has a light conductor for optically transmitting temperature information to a pyrometer. The light conductor has a first portion which is adapted to capture temperature information and a second portion which is connected to the pyrometer. The probe also has an enclosure for protecting the second portion of the light conductor. The enclosure in turn has a passageway for housing the second portion of the light conductor and an opening for projecting the first portion of the light conductor from the passageway to the outside of the enclosure. Additionally, a seal is provided in the passageway adjacent the opening to encapsulate the second portion of the light conductor inside the passageway.
申请公布号 WO9914565(A1) 申请公布日期 1999.03.25
申请号 WO1998US19166 申请日期 1998.09.15
申请人 APPLIED MATERIALS, INC. 发明人 YAM, MARK;PEUSE, BRUCE, W.
分类号 G01J5/00;G01J5/02;G01J5/04;G01J5/08;H01L21/66 主分类号 G01J5/00
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