发明名称 |
DEVICE FOR TRANSFERRING STRUCTURES |
摘要 |
The present invention relates to a device for transferring structures onto a layer to be structured. The device provided for in the invention is characterized in that it comprises a base element (3) and at least one beam-guiding structure (12) projecting from said base element (3). Said structure guides a beam to an outlet opening (8) facing away from the base element (3) and has a shape which is adapted to fit the structure to be transferred. |
申请公布号 |
WO9901586(A3) |
申请公布日期 |
1999.03.25 |
申请号 |
WO1998DE01834 |
申请日期 |
1998.07.02 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT;RUF, ALEXANDER |
发明人 |
RUF, ALEXANDER |
分类号 |
B82B1/00;G03F1/00;G03F7/20;H01L21/027 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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