发明名称 DEVICE FOR TRANSFERRING STRUCTURES
摘要 The present invention relates to a device for transferring structures onto a layer to be structured. The device provided for in the invention is characterized in that it comprises a base element (3) and at least one beam-guiding structure (12) projecting from said base element (3). Said structure guides a beam to an outlet opening (8) facing away from the base element (3) and has a shape which is adapted to fit the structure to be transferred.
申请公布号 WO9901586(A3) 申请公布日期 1999.03.25
申请号 WO1998DE01834 申请日期 1998.07.02
申请人 SIEMENS AKTIENGESELLSCHAFT;RUF, ALEXANDER 发明人 RUF, ALEXANDER
分类号 B82B1/00;G03F1/00;G03F7/20;H01L21/027 主分类号 B82B1/00
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