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发明名称
METHODE ZUR HERSTELLUNG EINES LITHOGRAPHISCHEN MUSTERS IN EINEM VERFAHREN ZUR HERSTELLUNG VON HALBLEITERVORRICHTUNGEN
摘要
申请公布号
DE69319901(T2)
申请公布日期
1999.03.25
申请号
DE19936019901T
申请日期
1993.03.29
申请人
MICROUNITY SYSTEMS ENGINEERING, INC., SUNNYVALE, CALIF., US
发明人
CHEN, JANG, FUNG, SAN JOSE, CA 95131, US;MATTHEWS, JAMES, A., MILPITAS, CA 95035, US
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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