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发明名称
摘要
申请公布号
JP2873583(B2)
申请公布日期
1999.03.24
申请号
JP19890115135
申请日期
1989.05.10
申请人
FUJITSU KK
发明人
TAKIGAWA MASAHIKO
分类号
H01L21/76;H01L21/205;H01L21/338;H01L27/095;H01L29/205;H01L29/778;H01L29/812;(IPC1-7):H01L29/778
主分类号
H01L21/76
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代理人
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