发明名称 |
Process for manufacturing microstructured bodies |
摘要 |
An epoxide lacquer under light and ultraviolet cure is used in the production of microstructurized articles with a structure depth in the range from several micrometers to millimeters by selective irradiation of polymer with x-radiation and selective dissolution of the solubilized or remaining soluble areas.
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申请公布号 |
EP0903638(A1) |
申请公布日期 |
1999.03.24 |
申请号 |
EP19980115393 |
申请日期 |
1998.08.17 |
申请人 |
STEAG MICROPARTS GMBH |
发明人 |
REINECKE, HOLGER, DR.;KAPITZKA, NORBERT;BALLHORN, RALPH-ULRICH;SCHAEFERMEIER, BERNHARD;SPITZNER, ULRIKE |
分类号 |
G03F7/027;B62D57/00;B81C3/00;G03F7/00;G03F7/038;G03F7/20;G03F7/32;H01L21/027;(IPC1-7):G03F7/039 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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