发明名称 Process for manufacturing microstructured bodies
摘要 An epoxide lacquer under light and ultraviolet cure is used in the production of microstructurized articles with a structure depth in the range from several micrometers to millimeters by selective irradiation of polymer with x-radiation and selective dissolution of the solubilized or remaining soluble areas.
申请公布号 EP0903638(A1) 申请公布日期 1999.03.24
申请号 EP19980115393 申请日期 1998.08.17
申请人 STEAG MICROPARTS GMBH 发明人 REINECKE, HOLGER, DR.;KAPITZKA, NORBERT;BALLHORN, RALPH-ULRICH;SCHAEFERMEIER, BERNHARD;SPITZNER, ULRIKE
分类号 G03F7/027;B62D57/00;B81C3/00;G03F7/00;G03F7/038;G03F7/20;G03F7/32;H01L21/027;(IPC1-7):G03F7/039 主分类号 G03F7/027
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