发明名称 |
Method and apparatus for processing a specimen |
摘要 |
The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.
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申请公布号 |
US5885354(A) |
申请公布日期 |
1999.03.23 |
申请号 |
US19960762423 |
申请日期 |
1996.12.09 |
申请人 |
ACT ADVANCED CIRCUIT TESTING GESELLSCHAFT FUR TESTSYSTEMENT-WICKLUNG MBH |
发明人 |
FROSIEN, JUERGEN;WINKLER, DIETER;ZIMMERMANN, HANS |
分类号 |
H01L21/66;C23C16/04;H01J37/305;H01J37/317;H01L21/00;H01L21/768;(IPC1-7):H01J37/285 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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