AIR CLEANING FILTER

摘要

PROBLEM TO BE SOLVED: To provide an air cleaning filter which excels in disaster prevention and does not cause lowering of humidity and can be used in a space of high purity in which substrates or the like can be prevented from being contaminated by organic matter. SOLUTION: In an air cleaning filter 11, adjacent to a first filter part 11a provided with synthetic zeolite and having air permeability on the upstream side or the downstream side thereof, a second filter part 11b having property of adsorbing gaseous organic impurities and provided with inorganic adsorbent having effective fine pore diameter larger than that of the synthetic zeolite and having air permeability is arranged. The effective fine diameter of the synthetic zeolite is not less than 7Å, and in the inorganic adsorbent of the second filter part 11b, it is preferable that the total volume of fine pores distributing in the range of 15-300Åis not less than 0.2 cc/g or that the specific surface area of the inorganic adsorbent is not less than 100 m<2> /g.