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发明名称
FINISH CLEANING
摘要
申请公布号
JPH1176959(A)
申请公布日期
1999.03.23
申请号
JP19970239993
申请日期
1997.09.04
申请人
OLYMPUS OPTICAL CO LTD
发明人
KARAKI KAZUHISA;TOMITANI MANABU
分类号
G02B1/10;B08B3/04;B08B3/08;B08B3/10;H01L21/304;(IPC1-7):B08B3/10
主分类号
G02B1/10
代理机构
代理人
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