发明名称 Photoresist composition
摘要 A photoresist composition containing a photo-curing polymer and a photosensitive agent, wherein the photosensitive agent comprises at least two compounds selected from the group consisting of 4,4'-diazido-2,2'-stilbenedisulfonate sodium salt, 4,4'-diazo-2,2'-dibenzalacetone disulfonate disodium salt, 2,5-bis(4-azido-2-sulfobenzylidene) cyclopentanone disodium salt and 4,4'-diazido-2,2'-dicinnamylideneacetone sulfonate salt. By performing a lithography process using the photoresist composition, the exposure time can be shortened, thereby improving the yield of products.
申请公布号 US5885744(A) 申请公布日期 1999.03.23
申请号 US19970892442 申请日期 1997.07.14
申请人 SAMSUNG DISPLAY DEVICES CO., LTD. 发明人 YOO, SEUNG-JOON;LIM, IK-CHUL;KIM, CHANG-WOOK;KANG, KI-WOOK
分类号 C08F2/50;G03F7/008;G03F7/016;G03F7/038;H01J9/227;H01L21/027;(IPC1-7):G03F7/012;G03C5/00 主分类号 C08F2/50
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