SEED CRYSTAL HOLDING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a seed crystal holding tool effective for preventing the concentration of high weight load of a grown single crystal to a single point and capable of surely and safely holding a seed crystal by contacting the seed crystal holding tool with the seed crystal by total plane contact during the growth of a single crystal. SOLUTION: This seed crystal holding tool 6 of a Czochralski single crystal pulling apparatus is provided with a heat-resistant cushioning material 23 placed between the surface of a seed crystal 5 and the contacting face of a claw 22 of the holding tool or between the notched face of the seed crystal and the contacting face of an insertion tool 24 of said holding tool and the seed crystal is fixed by pressing. The heat-resistant cushioning material, is carbon fiber felt, glass fiber felt, metallic fiber felt or ceramic fiber felt or a plastic deformation material such as Al.