发明名称 Single-side abrasion apparatus with dresser
摘要 An abrasion apparatus having a freely rotatable platen, an application block to which a workpiece is applied, and at least one pressing plate to press the workpiece on the platen with the application block being located therebetween. A working face of the platen is corrected by providing the pressing plate with a retaining ring to which the application block is fitted, which also serves as a dresser, and by pressing the retaining ring on the platen when the application block has been removed.
申请公布号 US5885140(A) 申请公布日期 1999.03.23
申请号 US19970863431 申请日期 1997.05.27
申请人 SPEEDFAM CO., LTD. 发明人 HAKOMORI, SHUNJI
分类号 B24B37/00;B24B37/04;B24B53/007;B24D3/06;(IPC1-7):B24B7/00 主分类号 B24B37/00
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