| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrolytic ionic water production apparatus which is equipped with electrodes indicating no metal elution into electrolytic water and produces alkaline water with stable properties in an amount nearly equal to that of acidic water, and a method therefor, and a method for cleaning semiconductor wafers, etc., using ionic water, especially alkaline water, produced by this apparatus. SOLUTION: A dummy anode 4' is installed in an electrolytic apparatus equipped with an anode 4 and a cathode 5, and power is applied to the dummy anode 4' and the cathode 5. In this electrolysis of pure water by the passage of current between the anode 4 and the cathode 5, by passing the current also between the dummy anode 4' and the cathode 5, the currents can be balanced and the electrolytic action of the cathode 5 can be activated by passing a normal quantity of current through the anode 4 and an excess quantity of current through the cathode 5 so that an equal amount of acidic water and alkaline water can be produced. Since a large amount of hydrogen gas is generated at the cathode 5 by the passage of current between the dummy anode 4' and the cathode 5, the electrolytic action is activated. |
