HEATER COOLING APPARATUS OF SEMICONDUCTOR DIFFUSION SYSTEM,申请号KR19950055205U-传众专利搜索

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发明名称	HEATER COOLING APPARATUS OF SEMICONDUCTOR DIFFUSION SYSTEM
摘要
申请公布号	KR0134671(Y1)	申请公布日期	1999.03.20
申请号	KR19950055205U	申请日期	1995.12.30
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	KANG, HYUNG-CHANG;LEE, CHUNG-DAE
分类号	H01L21/22;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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