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发明名称
METHOD FOR FORMING A FINE PATTERN
摘要
申请公布号
KR0172799(B1)
申请公布日期
1999.03.20
申请号
KR19950048039
申请日期
1995.12.08
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
KEUM, DONG-RYUL
分类号
G03F7/00;(IPC1-7):G03F7/00
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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