MANUAL VENT SYSTEM OF ION IMPLANT CHAMBER,申请号KR19940033469U-传众专利搜索

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发明名称	MANUAL VENT SYSTEM OF ION IMPLANT CHAMBER
摘要
申请公布号	KR0133927(Y1)	申请公布日期	1999.03.20
申请号	KR19940033469U	申请日期	1994.12.09
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	CHOE, MIN-KYU;OK, YONG-CHUL;LEE, JI-HUN
分类号	H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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