发明名称 BUBBLE REMOVING APPARATUS FROM FILTER HOUSING OF COATING EQUIPMENT
摘要 <p>An apparatus for removing bubbles in a filter housing of a coating equipment includes a cover coupled to the filter housing and including a bottom, an inlet portion, an outlet portion, and a drain portion, the bottom of the cover having an inclined surface at an angle, wherein the drain portion is above the inlet portion and the outlet portion on the inclined surface.</p>
申请公布号 KR0179284(B1) 申请公布日期 1999.03.20
申请号 KR19960004295 申请日期 1996.02.23
申请人 HYUNDAI MICRO ELECTRONICS CO.,LTD. 发明人 LEE, KEUN-WOONG
分类号 B01D46/42;B01D35/01;B01D35/02;B01D35/30;B01D36/00;B05B15/00;B05C11/10;G03F7/16;H01L21/027;(IPC1-7):B01D46/42 主分类号 B01D46/42
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