FABRICATING METHOD OF PLT THIN FILM,申请号KR19950004501-传众专利搜索

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发明名称	FABRICATING METHOD OF PLT THIN FILM
摘要
申请公布号	KR0179101(B1)	申请公布日期	1999.03.20
申请号	KR19950004501	申请日期	1995.03.06
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	LEE, SEUNG-SUK;KIM, HO-KI;KIM, JONG-CHUL;CHOE, SOO-HAN
分类号	C30B28/12;C23C16/02;C23C16/40;C30B29/32;H01L21/203;H01L21/285;H01L21/31;H01L21/314;H01L21/316;(IPC1-7):H01L31/00	主分类号	C30B28/12
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