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发明名称
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0136232(Y1)
申请公布日期
1999.03.20
申请号
KR19960003413U
申请日期
1996.02.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JANG, SAM-JIN
分类号
H01L21/223;(IPC1-7):H01L21/223
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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