A PROCESS FOR MANUFACTURING MICROSTRUCTURE BODIES

摘要

In order to manufacture microstructures by the LIGA process, plastic layers are deeply irradiated across the image-area with X-ray radiation. The areas of the plastic layers that have been rendered soluble or have remained soluble are removed selectively by means of a developer. Known plastics require a considerable outlay for irradiation. In the process according to the present invention, photo-hardened epoxy lacquers are used; these require considerably shorter irradiation time compared to known plastics. The microstructures can have a larger aspect ratio and can be developed without any faults even at greater structure depths. The structure precision that is achieved is in the sub-micrometer range. The process makes it possible to manufacture deep microstructures of very good quality, and to do so economically and with reduced irradiation outlay.