| 摘要 |
<p>A technique including a method and an apparatus for observing defects on a color filter assembly (119) by optically scattered energy from an illumination means (107). The technique includes directing back illumination (107) from a source (109) to highlight one group of color pixels (e.g. red, green, blue) from a color filter assembly (121) under inspection to produce scattered energy substantially normal to the color filter assembly (121). A further step of observing the scattered energy in one of a plurality of fractional windows of a viewed image of the color filter assembly via a plurality of focussing elements (103) at a plurality of remote focal planes having a detection arrangement is included. The focal planes are mounted adjacent one another in an array arrangement. Observing occurs without relative motion between the color filter assembly and the fractional windows to prevent a possibility of scanning noise and permit oversampling.</p> |
