发明名称 Stacked piezoelectric actuator manufacturing method e.g. for ultrasonic therapy device
摘要 The manufacturing method has the stacked actuator (SA) assembled from a number of piezoelectric layers (13,14). It is provided with a number of metallic layers (19,23,24,27) on one of their piezoelectric layer surfaces (15,16). At least one of the surfaces (15,16) has an adhesion characteristic, via which the piezoelectric layers are soldered together. The surfaces of the piezoelectric layers to which the metallic layers are applied are machined by grinding and/or polishing prior to application of these layers.
申请公布号 DE19742688(C1) 申请公布日期 1999.03.18
申请号 DE1997142688 申请日期 1997.09.26
申请人 SIEMENS AG, 80333 MUENCHEN, DE 发明人 SCHAETZLE, ULRICH, DIPL.-ING., 91341 ROETTENBACH, DE;FUCHS, ALFRED, LINZ, AT;SHELJASKOV, TODOR, DIPL.-ING., LINZ, AT;LERCH, REINHARD, PROF.DIPL.-ING., 90562 HEROLDSBERG, DE
分类号 H01L41/083;H01L41/24;(IPC1-7):H01L41/083;H04R17/00 主分类号 H01L41/083
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