Laserbearbeitungsgerät

摘要

In a laser process apparatus, a plurality of holes (Hn) each having a predetermined shape are formed in a work (W) upon radiation of light from an excimer laser (10). the apparatus is provided with a mask (30), in which a plurality of predetermined small holes (31) are formed in correspondence with the plurality of holes (Hn) to be formed in the work (W), and which allows laser light from said excimer laser (10) to pass through said small holes (31) thereof toward the work (W), a projection optical system (50) for projecting optical images each having a predetermined shape onto the work (W) through the small holes (31) of said mask (30), a measurement optical system (70, 80) for measuring a work position, and a moving stage (120) for moving the work (W) on the basis of a measurement result form said measurement optical system (70, 80).