| 摘要 |
<p>An economical, simple single crystal pull-up apparatus capable of preventing a single crystal from being polycrystallized, moving smoothly and softly the weight of the crystal from a necking portion to a clamping position such as a narrow portion when pulling up the crystal, and firmly holding the crystal even in case of power failure. The apparatus comprises a support base which is a dish-like member for supporting from below a large diameter portion of the lower part of a seed crystal (21), pulley means (4) for rotating the support base, capable of moving between a position at which it supports from below the lower end of the large diameter portion of the crystal and a position where it does not, depending on the angle of rotation, pulley rotation means (3a) and (3b) for rotating the pulley means and moving the support base between the two positions, and pulley pull-up means (3a) and (3b) for pulling up the support base by pulling up the pulley means while controlling the speed.</p> |
