Method for coating surfaces by means of an installation with sputter cathodes
摘要
<p>The sputter electrodes (17, 18, 19, 20) are fed with a bipolar pulsed voltage in such a way that they alternately function as cathodes and anodes. The pulse frequency lies between 1 kHz and 1 MHz. The operating parameters are chosen so that the electrodes during operation are at least partially covered with a coating material.</p>
