Ceramic substrate for semiconductor device

摘要

A ceramic substrate for use with a semiconductor device, includes an electrical conductor (2) composed of Ag, a resistor (4) composed of oxide, and a barrier layer (3) located between the electrical conductor (2) and the resistor (4) and composed of a material selected from a group consisting of AgPd and AgPt. The ceramic substrate prevents a diffusion of Ag atoms between the electrical conductor (2) and the resistor (4), and hence provides a stable internal resistance.